Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081317 | Electrostatic chuck with anti-reflective coating, measuring method and use of said chuck | Gerhard Kalkowski, Olaf Stenzel | 2011-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081317 | Electrostatic chuck with anti-reflective coating, measuring method and use of said chuck | Gerhard Kalkowski, Olaf Stenzel | 2011-12-20 |