Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919345 | Method of fabricating micromechanical components with free-standing microstructures or membranes | Mario Kirsten, Peter Lange, Beatrice Wenk | 2011-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919345 | Method of fabricating micromechanical components with free-standing microstructures or membranes | Mario Kirsten, Peter Lange, Beatrice Wenk | 2011-04-05 |