Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7902506 | Phase-shifting element and particle beam device having a phase-shifting element | Bastian Barton, Gerd Benner, Harald Rose | 2011-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7902506 | Phase-shifting element and particle beam device having a phase-shifting element | Bastian Barton, Gerd Benner, Harald Rose | 2011-03-08 |