Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057963 | Maskless vortex phase shift optical direct write lithography | Ebo Croffie, Neal Callan | 2011-11-15 |
| 8012873 | Method for providing temperature uniformity of rapid thermal annealing | — | 2011-09-06 |