Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960670 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Paul MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2011-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960670 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Paul MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2011-06-14 |