Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053372 | Method of reducing plasma stabilization time in a cyclic deposition process | Frank Greer | 2011-11-08 |
| 7871676 | System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) | Tony P. Chiang | 2011-01-18 |
| 7871678 | Method of increasing the reactivity of a precursor in a cyclic deposition process | Frank Greer | 2011-01-18 |