Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075729 | Method and apparatus for controlling temperature of a substrate | Theodoros Panagopoulos | 2011-12-13 |
| 7879185 | Dual frequency RF match | Steven C. Shannon | 2011-02-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075729 | Method and apparatus for controlling temperature of a substrate | Theodoros Panagopoulos | 2011-12-13 |
| 7879185 | Dual frequency RF match | Steven C. Shannon | 2011-02-01 |