Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062471 | Proximity head heating method and apparatus | Katrina Mikhaylichenko | 2011-11-22 |
| 7967916 | Method of preventing pattern collapse during rinsing and drying | Seokmin Yun | 2011-06-28 |