Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951616 | Process for wafer temperature verification in etch tools | Keren Jacobs Kanarik, James Rogers, Bi-Ming Yen | 2011-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7951616 | Process for wafer temperature verification in etch tools | Keren Jacobs Kanarik, James Rogers, Bi-Ming Yen | 2011-05-31 |