Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071916 | Wafer heating apparatus and semiconductor manufacturing apparatus | Keiji Iwata, Koichi Nagasaki | 2011-12-06 |
TN
Tsunehiko Nakamura
Overall (2011): #139,186 of 364,097Top 40%
1
Patents 2011