Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7921802 | System and method for suppression of wafer temperature drift in cold-wall CVD systems | — | 2011-04-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7921802 | System and method for suppression of wafer temperature drift in cold-wall CVD systems | — | 2011-04-12 |