Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080813 | Ion implanter, internal structure of ion implanter and method of forming a coating layer in the ion implanter | Kyung-Ic Jang, Kyung-Hwan Ye, Yong-Sup Reim | 2011-12-20 |