Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923684 | Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles | Min-Sub Kang, Sang-Kil Lee, Kwang-Sik Kim, Kyung-Ho Jung | 2011-04-12 |