Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003952 | Integrated deflectors for beam alignment and blanking in charged particle columns | James Spallas, Charles Silver | 2011-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003952 | Integrated deflectors for beam alignment and blanking in charged particle columns | James Spallas, Charles Silver | 2011-08-23 |