Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7997002 | Dual carbon nanotubes for critical dimension metrology on high aspect ratio semiconductor wafer patterns | — | 2011-08-16 |
WL
Wei Lu
Overall (2011): #132,828 of 364,097Top 40%
1
Patents 2011