Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052885 | Structural modification using electron beam activated chemical etch | Mehran Naser-Ghodsi, Garrett Pickard, Ming Lun Yu, Kenneth Krzeczowski, Matthew Lent +3 more | 2011-11-08 |
| 7879730 | Etch selectivity enhancement in electron beam activated chemical etch | Mehran Naser-Ghodsi, Garrett Pickard, Tzu-Chin Chuang, Ming Lun Yu, Kenneth Krzeczowski +4 more | 2011-02-01 |