Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008207 | Use of ion implantation in chemical etching | Ming Lun Yu | 2011-08-30 |
| 7945086 | Tungsten plug deposition quality evaluation method by EBACE technology | Yehiel Gotkis, Sergey Lopatin | 2011-05-17 |