Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8063365 | Non-shot-noise-limited source for electron beam lithography or inspection | Alan D. Brodie | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8063365 | Non-shot-noise-limited source for electron beam lithography or inspection | Alan D. Brodie | 2011-11-22 |