Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004679 | Target design and methods for scatterometry overlay determination | Vladimir Levinski | 2011-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004679 | Target design and methods for scatterometry overlay determination | Vladimir Levinski | 2011-08-23 |