Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7942619 | Carrier unit of substrate transfer apparatus | Masao Takatori, Yasuo Hirooka | 2011-05-17 |
| 7874782 | Wafer transfer apparatus and substrate transfer apparatus | — | 2011-01-25 |