Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004053 | Micromechanical device and method of manufacturing micromechanical device | Michinobu Inoue, Susumu Obata, Yoshiaki Sugizaki | 2011-08-23 |
| 7972884 | Micromechanical device and method of manufacturing micromechanical device | Susumu Obata, Michinobu Inoue | 2011-07-05 |