Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947413 | Pattern evaluation method | Keiko Morishita | 2011-05-24 |
| 7927770 | Defect correction method for EUV mask | — | 2011-04-19 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947413 | Pattern evaluation method | Keiko Morishita | 2011-05-24 |
| 7927770 | Defect correction method for EUV mask | — | 2011-04-19 |