Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998827 | Method of forming a multi-level interconnect structure by overlay alignment procedures | — | 2011-08-16 |
| 7994054 | Semiconductor device having oxidized metal film and manufacture method of the same | Atsuko Sakata, Junichi Wada, Seiichi Omoto, Soichi Yamashita, Kazuyuki Higashi +5 more | 2011-08-09 |
| 7996813 | Method for generating pattern, method for manufacturing semiconductor device, semiconductor device, and computer program | Motoya Okazaki, Junichi Wada, Takeshi Nishioka, Hisashi Kaneko, Takeshi Fujimaki +3 more | 2011-08-09 |