Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066020 | Substrate cleaning apparatus and substrate cleaning method | Hiroshi Tomita, Hiroaki Yamada, Hajime Onoda | 2011-11-29 |
| 7902030 | Manufacturing method for semiconductor device and semiconductor device | Takayuki Ito, Yusuke Oshiki, Kouji Matsuo, Kenichi Yoshino, Takaharu Itani +3 more | 2011-03-08 |
| 7875527 | Manufacturing method for semiconductor device and semiconductor device | Yasuhiro Ito, Kenji Takakura | 2011-01-25 |
| 7875557 | Semiconductor substrate treating method, semiconductor component and electronic appliance | Hiroyuki Matsuo, Toshiki Nakajima | 2011-01-25 |