Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081294 | Method of evaluating optical beam source of exposure device, method of designing illumination shape of exposure device, and software for optimizing illumination shape of exposure device | — | 2011-12-20 |
| 7985517 | Lithography simulation method, computer program product, and pattern forming method | Satoshi Tanaka | 2011-07-26 |