Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871564 | High-purity Ru alloy target, process for producing the same, and sputtered film | Yuichiro Shindo | 2011-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871564 | High-purity Ru alloy target, process for producing the same, and sputtered film | Yuichiro Shindo | 2011-01-18 |