Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7974067 | Plasma processing apparatus and method of suppressing abnormal discharge therein | Natsuko Ito, Fumihiko Uesugi, Yousuke Itagaki | 2011-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7974067 | Plasma processing apparatus and method of suppressing abnormal discharge therein | Natsuko Ito, Fumihiko Uesugi, Yousuke Itagaki | 2011-07-05 |