Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8035668 | Exposure apparatus and device manufacturing method | Mitsuro Sugita, Kazuaki Ohmi, Takao Yonehara, Toshihiko Tsuji, Takaaki Terashi +1 more | 2011-10-11 |
| 7994952 | Converter, conversion method, program, and recording medium | Satoshi HIRONAKA, Kazuyuki Aihara | 2011-08-09 |