Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8008638 | Ion implantation apparatus and ion implantation method | — | 2011-08-30 |
| 7956335 | Wafer holding tool for ion implanting apparatus | — | 2011-06-07 |
| 7884000 | Method for manufacturing simox wafer | Riyuusuke Kasamatsu, Yukio Komatsu | 2011-02-08 |