Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059276 | Ellipsometric investigation and analysis of textured samples | James N. Hilfiker, Jianing Sun, Martin M. Liphardt | 2011-11-15 |
| 8013996 | Spatial filter in sample investigation system | Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger | 2011-09-06 |
| 7872751 | Fast sample height, AOI and POI alignment in mapping ellipsometer or the like | Martin M. Liphardt, Jeffrey S. Hale, Galen L. Pfeiffer | 2011-01-18 |