Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8016647 | Polishing pad and method thereof | Shen-Yu Chang, Wen-Chang Shih | 2011-09-13 |
| 7875335 | Method of fabricating polishing pad having detection window thereon | Wen-Chang Shih, Min-Kuei Chu, Lung-Chen Wei | 2011-01-25 |