Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022491 | High aspect ratio all SiGe capacitively coupled MEMS devices | Loi N. Nguyen | 2011-09-20 |
| 7943410 | Embedded microelectromechanical systems (MEMS) semiconductor substrate and related method of forming | Olivier Le Neel, Peyman Sana, Loi N. Nguyen | 2011-05-17 |