Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7987057 | Intelligent stitching boundary defect inspection | — | 2011-07-26 |
| 7924408 | Temperature effects on overlay accuracy | Mei Sun, Mark Wiltse | 2011-04-12 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7987057 | Intelligent stitching boundary defect inspection | — | 2011-07-26 |
| 7924408 | Temperature effects on overlay accuracy | Mei Sun, Mark Wiltse | 2011-04-12 |