Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7965375 | Lithography mask, rewritable mask, process for manufacturing a mask, device for processing a substrate, lithographic system and a semiconductor device | — | 2011-06-21 |
| 7872729 | Filter system for light source | Christoph Noelscher | 2011-01-18 |