Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989248 | Method of forming monolithic CMOS-MEMS hybrid integrated, packaged structures | G. Krishna Kumar, Nishit A. Choksi | 2011-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989248 | Method of forming monolithic CMOS-MEMS hybrid integrated, packaged structures | G. Krishna Kumar, Nishit A. Choksi | 2011-08-02 |