HM

Hirohiko Murata

SA Sen Corporation, An Shi And Axcelis: 1 patents #1 of 2Top 50%
📍 Toyohashi, JP: #42 of 115 inventorsTop 40%
Overall (2011): #286,010 of 364,097Top 80%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7947129 Ion source apparatus and cleaning optimized method thereof Masateru Sato 2011-05-24