Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960313 | Combinatorial processing including stirring | Nitin Kumar | 2011-06-14 |
| 7919446 | Post-CMP cleaning compositions and methods of using same | Anh Duong, Chi-I Lang, Nikhil Kalyankar, Nicole Rutherford, Alexander Gorer | 2011-04-05 |
| 7902064 | Method of forming a layer to enhance ALD nucleation on a substrate | Tony P. Chiang, Chi-I Lang | 2011-03-08 |
| 7879710 | Substrate processing including a masking layer | Chi-I Lang, Sandra G. Malhotra, Tony P. Chiang, Thomas R. Boussie, Nitin Kumar +2 more | 2011-02-01 |