Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080475 | Removal chemistry for selectively etching metal hard mask | Kanwal Jit Singh | 2011-12-20 |
| 8017568 | Cleaning residues from semiconductor structures | Shan Clark, Robert Turkot | 2011-09-13 |
| 7977228 | Methods for the formation of interconnects separated by air gaps | — | 2011-07-12 |