Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083463 | Mini clean room for preventing wafer pollution and using method thereof | Jhin-Siang Jhong, Chen-Lung Huang | 2011-12-27 |
| 8013748 | System for monitoring temperature and slope of a wafer and a method thereof | Chi-Fen Chen | 2011-09-06 |