Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076055 | Passivation of multi-layer mirror for extreme ultraviolet lithography | Siegfried Schwarzl | 2011-12-13 |
SW
Stefan Wurm
Overall (2011): #157,605 of 364,097Top 45%
1
Patents 2011