Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7969555 | Lens structure, optical system having the same, and lithography method using the optical system | — | 2011-06-28 |
| 7952684 | Light-modulating nano/micro scale aperture array device having immersion layer and high speed nano scale pattern recording system using the same | — | 2011-05-31 |