Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7872741 | Method and apparatus for scatterfield microscopical measurement | Sen-Yih Chou, Shu-Ping Dong, Deh-Ming Shyu, Chia-Lin Wu, Yi-Sha Ku +1 more | 2011-01-18 |
| 7864324 | Reflective scatterometer | Deh-Ming Shyu, Yi-Sha Ku, Sen-Yih Chou, Shu-Ping Dong | 2011-01-04 |