Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057972 | Constant current multi-beam patterning | Heinrich Fragner, Adrian Bürli | 2011-11-15 |
| 8049189 | Charged particle system | Herbert Buschbeck, Gerhard Stengl, Herbert Vonach | 2011-11-01 |
| 8026495 | Charged particle beam exposure system | — | 2011-09-27 |