Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080505 | Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metals | Didem Ernur, Jörg Schuhmacher | 2011-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080505 | Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metals | Didem Ernur, Jörg Schuhmacher | 2011-12-20 |