Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002025 | Containment of a wafer-chuck thermal interface fluid | David M. Audette, David L. Gardell | 2011-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002025 | Containment of a wafer-chuck thermal interface fluid | David M. Audette, David L. Gardell | 2011-08-23 |