Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7928565 | Semiconductor device with a high thermal dissipation efficiency | Thomas J. Brunschwiler, Mark A. Lantz, Bruno Michel, Peter Vettiger | 2011-04-19 |
| 7906887 | Microsystem and method for positioning a second element with respect to a first element in a microsystem | Bernd W. Gotsmann, Urs T. Duerig | 2011-03-15 |
| 7862858 | Scanning probe-based lithography method | Urs T. Duerig, Jane Elizabeth Frommer, Bernd W. Gotsmann, James L. Hedrick, Craig J. Hawker +1 more | 2011-01-04 |