Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8078995 | Efficient isotropic modeling approach to incorporate electromagnetic effects into lithographic process simulations | Jaione Tirapu Azpiroz, Alan E. Rosenbluth | 2011-12-13 |
| 8059884 | Method and system for obtaining bounds on process parameters for OPC-verification | Maharaj Mukherjee, Alan E. Rosenbluth | 2011-11-15 |