Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7864502 | In situ monitoring of wafer charge distribution in plasma processing | Kevin Boyd, James A Gallo, Mark L. Reath, Barbara L Shiffler, Justin W. Wong | 2011-01-04 |
EH
Edward P. Higgins
Overall (2011): #311,155 of 364,097Top 90%
1
Patents 2011