Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7890202 | Method for creating wafer batches in an automated batch process tool | Russell H. Arndt, Michael Robert Biagetti, Robert J. MacHugh | 2011-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7890202 | Method for creating wafer batches in an automated batch process tool | Russell H. Arndt, Michael Robert Biagetti, Robert J. MacHugh | 2011-02-15 |