Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7927096 | Substrate support structure, heat treatment apparatus using same, first sheet-like object for use in the substrate support structure, method of manufacturing the substrate support structure, heat treatment apparatus, and substrate sucking method | Yasuhiro Fukumoto, Hiroshi Miyauchi, Hideyuki Taniguchi | 2011-04-19 |
| 7914163 | Ventilation fan and light | James E. Barrett | 2011-03-29 |